Journal: Microsystems & Nanoengineering

Article Title: An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement

doi: 10.1038/s41378-023-00484-5

Figure Lengend Snippet: a , b 3D structure modeled in COMSOL. Blue area in ( a ) is subject to inertial force. Blue area in ( b ) corresponds to the terminal for charge output. c The 1st vibration mode. The red indicates large displacement while the blue means smaller displacement. d Output charge versus frequency from 0.1 to 1300 Hz. Inserted is the enlarged view from 0.1 to 200 Hz. e Short-circuit output charge of the accelerometer versus excitation acceleration. f Thermal mechanical and thermal electrical noise equivalent acceleration of the accelerometer versus excitation frequency

Article Snippet: \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$d=\left[\begin{array}{cccccc}0&0&0&0&125.5&0\\ 0&0&0&125.5&0&0\\ 17&17&73&0&0&0\\ \end{array}\right]\times 1{0}^{-12}\times \frac{{{{\rm{C}}}}}{{{{\rm{N}}}}},$$\end{document} d = 0 0 0 0 125.5 0 0 0 0 125.5 0 0 17 17 73 0 0 0 × 0 − 12 × C N , Fig. 2 Modeled structure and simulation results of the designed accelerometer. a , b 3D structure modeled in COMSOL.

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